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Micromachined Mirrors provides an overview of the performance enhancements that will be realized by miniaturizing scanning mirrors like those used for laser printers and barcode scanners, and the newly enabled applications, including raster-scanning projection video displays and compact, high-speed fiber-optic components. There are a wide variety of methods used to fabricate micromachined mirrors - each with its advantages and disadvantages. There are, however, performance criteria common to mirrors made from any of these fabrication processes. For example, optical resolution is related to the mirror aperture, the mirror flatness, and the scan angle. Micromachined Mirrors provides a framework for the design of micromirrors, and derives equations showing the fundamental limits for micromirror performance. These limits provide the micromirror designer tools with which to determine the acceptable mirror geometries, and to quickly and easily determine the range of possible mirror optical resolution and scan speed.
Proceedings of the 20th Course of the International School of Quantum Electronics held in Erice, Italy, November 14-24, 1996
This book describes Microelectromechanical systems (MEMS) technology and demonstrates how MEMS allow miniaturization, parallel fabrication, and efficient packaging of optics, as well as integration of optics and electronics. The book shows how the characteristics of MEMS enable practical implementations of a variety of applications, including projection displays, fiber switches, interferometers, and spectrometers. The authors conclude with an up-to-date discussion of the need for the combination of MEMS and Photonic crystals.
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

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